Open AWE Magazine menu
Subscribe Login

Home / Articles and Press Releases / Press Release / Perfect Temperature Control For the Semi-Conductor Industry

CATEGORIES

  • Latest Issue
  • Air Quality
  • Chromatography
  • Construction
  • Climate Change
  • Emissions
  • Environmental & Monitoring Technology
  • Gas Detection
  • Health and Safety Awareness
  • Humidity & Temperature
  • Laboratory Testing
  • Land Remediation
  • Marine Pollution
  • Noise Monitoring
  • Regulations & Legislations
  • Sludge and Biosolids
  • Soil Analysis
  • Spectroscopy
  • Weather Monitoring
  • Water Analysis
  • Water Monitoring

MORE

  • Press Releases
  • Events
  • Videos
  • Magazines

COMPANY

  • About
  • Advertising
  • Newsletter
  • Contact
HSI White logo
Open AWE Magazine menu
Subscribe

Home / Articles and Press Releases / Press Release / Perfect Temperature Control For the Semi-Conductor Industry

CATEGORIES

  • Latest Issue
  • Air Quality
  • Chromatography
  • Construction
  • Climate Change
  • Emissions
  • Environmental & Monitoring Technology
  • Gas Detection
  • Health and Safety Awareness
  • Humidity & Temperature
  • Laboratory Testing
  • Land Remediation
  • Marine Pollution
  • Noise Monitoring
  • Regulations & Legislations
  • Sludge and Biosolids
  • Soil Analysis
  • Spectroscopy
  • Weather Monitoring
  • Water Analysis
  • Water Monitoring

MORE

  • Press Releases
  • Events
  • Videos
  • Magazines

COMPANY

  • About
  • Advertising
  • Newsletter
  • Contact

CATEGORIES

  • Heat and Flame
  • Press Release|Gas Detection
  • Article
  • Press Release
  • Air Quality
  • Chromatography
  • Construction
  • Climate Change
  • Emissions
  • Environmental & Monitoring Technology
  • Gas Detection
  • Health and Safety Awareness
  • Humidity & Temperature
  • Laboratory Testing
  • Land Remediation
  • Marine Pollution
  • Noise Monitoring
  • Personal Protective Equipment
  • Regulations & Legislations
  • Sludge and Biosolids
  • Soil Analysis
  • Spectroscopy
  • Weather Monitoring
  • Water Analysis
  • Water Monitoring
  • Wellbeing at work

Press Release

Perfect Temperature Control For the Semi-Conductor Industry

By LAUDA

| Read Bio

Published: April 22nd, 2020

Share this article

Lauda-Königshofen, April 2nd, 2020 – Thermoelectric process thermostats, which are used in the temperature control of etching processes in the semiconductor industry, have been a permanent feature of LAUDA’s comprehensive portfolio since its acquisition by Noah Precision (now LAUDA-Noah) in 2014. Now the global market leader has fully revised and expanded the former POU product line with the new “Semistat” series.

The new LAUDA Semistat product line comprises three models: LAUDA’s Semistat S 1200 is an affordable entry-level device that offers an even smaller footprint than its predecessor – with the same cooling output of 1.2 kW at 20°C. Meanwhile, the newly developed Semistat S 2400 retains the mechanical and hydraulic structure of the product line. The process thermostat also incorporates the latest innovations from the thermoelectrics sector, such as the latest generation of high-performance Peltier elements, which guarantees a higher power density and greater reliability. With the Semistat 4400, LAUDA has brought a whole new performance class with 4.4 kW cooling output to market. This process thermostat is specially designed for applications using 300 mm wafers with a high cooling output requirement at low temperatures.

 

LAUDA_Semistat

LAUDA has renewed its portfolio of thermoelectric process thermostats. The LAUDA Semistat product line boasts both energy efficiency and the smallest footprint in the industry. Semistat thermostats are used in the semicon-ductor industry.

Thermoelectric process thermostats for the semiconductor industry from -20 to 90 °C

Semistat process thermostats have been optimized for precision temperature control in plasma etching applications in the semiconductor industry. Defined areas are removed from the surface of the wafers during the etching process. A dynamic temperature controller keeps the wafer chucks located inside the plasma etching chamber at a constant temperature, to prevent temperature drift. The constant temperature is crucial in maintaining a stable etching profile and producing a high-quality surface. Peltier technology realizes the two main advantages of Semistat thermostats: energy and space savings combined with maximum long-term operational stability.

The new process thermostats are extremely energy-efficient because they only control the temperature and consume energy when there is a need to regulate the temperature inside the etching chamber. Since the Peltier element is the only component used for heating and cooling, it is possible to minimize the space requirements of the thermostat. The compact design and optional underfloor installation ensure that minimal space is occupied in the cost-intensive cleanroom. A small internal fluid volume and short hose connections from the device to the application mean that less energy is required to control the fluid temperature. The low volume of the temperature control fluid, in particular, allows rapid temperature changes. Semistat temperature control systems use up to 90 percent less energy than compressor-based systems.

Like its established predecessor, the Semitat product line has a working temperature range of -20 to 90°C and offers a high temperature stability of ±0.1 K. With cooling outputs from 1.2 to 4.4 kW, the water-cooled devices can be used in combination with a large variety of chamber and platform models.

 

The most important functions of LAUDA Semistat process thermostats

  • Compressor and refrigerant-free system with low energy consumption
  • Smallest footprint in the industry
  • Extremely low volume of heat transfer fluid
  • Use of perfluorinated fluids
  • Improved accessibility and minimal cleanroom use
  • No filters or DI components required
  • High reliability and low operating costs
  • Locally exchangeable modules for easy troubleshooting
  • Dynamic, stable temperature control at the point of use
  • Temperature drift prevention for stable etching profiles
  • Improved wafer-to-wafer stability

Share this article

ABOUT THE AUTHOR

LAUDA

Precise temperature control.

Lauda’s constant temperature equipment and heating and cooling systems are at the heart of many applications.

A full-service provider, Lauda guarantee the optimum temperature in research, production and quality control.

Connect with LAUDA

Visit Website

POPULAR POSTS BY LAUDA

Press Release

Precise Temperature Control in the Digital Age

Lauda’s First Overseas Employee Honoured With Award

Press Release

Lauda’s First Overseas Employee Honoured With Award

Italian agency DELO receives LAUDA Award

Press Release

Italian agency DELO receives LAUDA Award

Shining Example Of International Collaboration

Press Release

First LAUDA agency Beun de Ronde is awarded the Dr. Rudolf Wobser Medal

Investment in the Future of Industrial Temperature Control Technology

Press Release

Investment in the Future of Industrial Temperature Control Technology

Innovative Temperature Control Technology in the Focus of the Process Industry

Press Release

Innovative Temperature Control Technology in the Focus of the Process Industry

Get email updates

Sign up for the AWE newsletter

Keep up-to-date through the power of email and receive the latest environmental monitoring product information and newsletter emails from AWE - Monitoring and Analysing the Impact of Industry on the Environment

"*" indicates required fields

Country
*
This field is for validation purposes and should be left unchanged.

FEATURED ARTICLES

Press Release

Blackline Safety and NevadaNano Reach Milestone in Deployment of Industry-First Sensors

Press Release

The Benefits of Using Refurbished Parts in Your Lab

Advertisement

SOCIAL MEDIA

AWE on Facebook

https://www.facebook.com/AWEIMagazine/

Advertisement

SOCIAL MEDIA

AWE on Twitter

Retweet on Twitter AWE International Magazine Retweeted
Avatar Avantes @avanteshq ·
1 Feb

Meet the next-generation spectrometer, the #Pacto!
This versatile and powerful device, available in three configurations, is sure to revolutionize the world of #spectroscopy.

Click the link to discover the Pacto: https://www.avantes.com/news/pacto-spectrometer-release/

https://www.youtube.com/watch?v=AZJXb-ZN4WY

Reply on Twitter 1620703609657909248 Retweet on Twitter 1620703609657909248 1 Like on Twitter 1620703609657909248 2 Twitter 1620703609657909248

Advertisement

SUBSCRIBE

Stay up to date with our newsletter

    • Keep up-to-date with Europe’s largest audited environmental monitoring magazine

 

    • Delivering the latest information on new products and emerging technologies related to industrial environmental monitoring.

 

This field is for validation purposes and should be left unchanged.

Subscribe

SUBSCRIBE TO AWE MAGAZINE

5 reasons to subscribe to our digital and print package

  • Stay up to date from anywhere in the world, with instant access to the latest issue straight from your phone, tablet or laptop.
  • Trust that you’re getting the best content from our range of internationally accredited authors.
  • Get full access to our archives and see how the environmental monitoring landscape has evolved with us over the years.
  • Enjoy our monthly newsletter curated with up-to-the-minute news and a selection of editor’s top picks.
  • Hot off the press and straight to your door – look forward to your own glossy copy of AWE, delivered five times a year
Subscribe View Subscription levels

STAY SAFE & INFORMED

Subscribe to the latest environmental monitoring articles, news, products and regulations

Find out more

Stay up to date with our newsletter

  • This field is for validation purposes and should be left unchanged.

ABOUT

  • About AWE
  • Advertise
  • Contact Us

YOUR ACCOUNT

Sign In Register Account Subscribe to AWE

RESOURCES

Request Media Pack

CONNECT

ACCREDITATIONS

Copyright Bay Publishing 2023. All Rights reserved.

Designed & Built by:
  • Terms & Conditions
  • Privacy Policy
  • Cookie Policy
We use cookies on our website to give you the most relevant experience by remembering your preferences and repeat visits. By clicking “Accept”, you consent to the use of ALL the cookies.
Cookie settingsACCEPT
Manage consent

Privacy Overview

This website uses cookies to improve your experience while you navigate through the website. Out of these, the cookies that are categorized as necessary are stored on your browser as they are essential for the working of basic functionalities of the website. We also use third-party cookies that help us analyze and understand how you use this website. These cookies will be stored in your browser only with your consent. You also have the option to opt-out of these cookies. But opting out of some of these cookies may affect your browsing experience.
Necessary
Always Enabled
Necessary cookies are absolutely essential for the website to function properly. These cookies ensure basic functionalities and security features of the website, anonymously.
CookieDurationDescription
cookielawinfo-checbox-analytics11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Analytics".
cookielawinfo-checbox-functional11 monthsThe cookie is set by GDPR cookie consent to record the user consent for the cookies in the category "Functional".
cookielawinfo-checbox-others11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Other.
cookielawinfo-checkbox-necessary11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookies is used to store the user consent for the cookies in the category "Necessary".
cookielawinfo-checkbox-performance11 monthsThis cookie is set by GDPR Cookie Consent plugin. The cookie is used to store the user consent for the cookies in the category "Performance".
viewed_cookie_policy11 monthsThe cookie is set by the GDPR Cookie Consent plugin and is used to store whether or not user has consented to the use of cookies. It does not store any personal data.
Functional
Functional cookies help to perform certain functionalities like sharing the content of the website on social media platforms, collect feedbacks, and other third-party features.
Performance
Performance cookies are used to understand and analyze the key performance indexes of the website which helps in delivering a better user experience for the visitors.
Analytics
Analytical cookies are used to understand how visitors interact with the website. These cookies help provide information on metrics the number of visitors, bounce rate, traffic source, etc.
Advertisement
Advertisement cookies are used to provide visitors with relevant ads and marketing campaigns. These cookies track visitors across websites and collect information to provide customized ads.
Others
Other uncategorized cookies are those that are being analyzed and have not been classified into a category as yet.
SAVE & ACCEPT