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Home / Articles and Press Releases / Press Release / MFCs With Integrated Shut-Off Valve

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Press Release

MFCs With Integrated Shut-Off Valve

By Axetris AG

| Read Bio

Published: October 30th, 2017

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Axetris MFCs are now available on request with an integrated pneumatic shut-off valve.

For vacuum applications, e.g. in various thin film coating processes, an additional positive shut-off is required in order to maintain vacuum process stability and avoid target poisoning.

Axetris mass flow controllers are now available on request with an integrated pneumatic shut-off valve, typically providing leak tightness to 10-10 mbar l/sec He. The integrated solutions can be made available with all standard connections such as VCO/VCR.

The integrated solution simplifies design-in into existing systems for OEMs worldwide, who continue to benefit from superior mass flow control performance of Axetris MFCs, such as:

  • Excellent Reproducibility: Repeatability better than +/- 0.15% O.R. combined with long-term stability to eliminate the need to re-calibrate, and ensure constant thin film properties over time
  • Quick Reaction Time: Less than 150ms to a stable state for real-time control of gas flows and tight control of deposition processes
  • Unmatched Dynamic Range: Turndown ratio of better than 1000:1 to achieve instrument flexibility and reduce MFC variants

Contact the flow experts at Axetris to discuss your application needs.

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ABOUT THE AUTHOR

Axetris AG

Axetris is a leading provider of components and modules for gas sensing, gas flow and gas control, powered by Axetris’ proprietary platinum based Pt-microchip technology. All products are manufactured at Axetris’ state-of-the-art micro-technology clean room facilities in the central part of Switzerland.

The product range includes ultra-compact, high-accuracy and fast response mass-flow meters and controllers, rugged infrared light sources for advanced gas sensing applications in mid-IR and high-selectivity laser gas detectors based on tuneable diode laser spectrometry.

Axetris is also a leading provider of micro-optical lenses and diffractive optics and offers MEMS Services for select customers. Axetris engineering and manufacturing teams combine broad experience in design, manufacturing and metrology from the microchip to advanced electronic modules.

With broad and in-depth application know-how, Axetris supports its customers in many industries. Customers benefit from excellent product value, consistent high product quality and outstanding customer support. Original equipment manufacturers (OEMs) rely for customer specific solutions on Axetris as a competent partner from concept to volume production.

Axetris AG is a company of the privately owned Leister Group which has over 60 years experience in the development, production and worldwide distribution of premium technical products.

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